| Coad | 667929 | Substrate | UVFS(KrF) | |
| Type | Window | Clear Aperture | - | |
| Diameter(mm) | 50.0 x 30.0 | Diameter Tolerance | +0/-0.1mm | |
| Thickness(mm) | 9.00 | Thickness Tolerance | +0/-0.1mm | |
| Wavelength(nm) | 257 - 266 | Parallelism | - | |
| Transmission Efficiency (%) | 99.5 | Surface Quality S1 | - | |
| AOI | 0° | Transmission Wavefront Deviation | - | |
| Coating Type | Dielectric Coating | Laser Damage Threshold | - | |
| Coating Specifications | AR@257-266nm | |||














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%High praise
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