| Coad | 667080 | Type | Harmonic Beam Splitter | |
| Dimension(mm) | 25.4 x 3.0 | AOI(°) | 45 | |
| Diameter | 25.4mm +0/-0.1 mm | Thickness | 3.0mm +0/-0.1 mm | |
| HR Wavelength (nm) | 256 - 276 | HT Wavelength (nm) | 400 | |
| Substrate | UVFS | Clear Aperture | - | |
| Parallelism | - | Protective Chamfer | - | |
| Surface Quality S1 | - | Surface Quality S2 | - | |
| Surface Flatness | - | Coating Type | IBS | |
| Reflectivity | - | Transmittance | - | |
| Coating Parameter S1 | HR@256-276nm,AR@380-420nm&740-860nm | Coating Parameter S2 | Uncoated |














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