| Coad | 666860 | Type | Piezoelectric Linear Translation Stage | |
| Table Size(mm) | 22.0 x 15.0 | Travel(mm) | 10 | |
| Resolution(μm per microstep) | 0.01 | Motor Type | - | |
| Material | Aluminum Alloy | Motion Parallelism | <2μm | |
| Motion Straightness | <1μm | Drive Mechanism | - | |
| Guide Mechanism | Precision Ball Bearing Guide Rail | Unidirectional Positioning Accuracy | - | |
| Repeatability | - | Reset Positioning Accuracy | - | |
| Backlash | - | Vertical Load | 0.15 | |
| Horizontal Load | 2 | Speed | 1.5mm/s @LBCF30 | |
| Maximum Acceleration | - | Thread Specification | - | |
| Surface Treatment | - | Accessories Included | - | |
| Angle Range | <60arcsec (Pitch) / <20arcsec (Yaw) | Power Consumption | - | |
| Minimum Repeatable Motion Increment | - | Minimum Step Size | - | |
| Power Interface | 2-Pin HRS Connector | Power Requirements | - | |
| Maximum Accuracy Percentage on Axis | - | Calibration Accuracy on Axis | - | |
| Speed Stability | - | Weight | 8g | |
| Driver Type | Piezoelectric Inertial Actuator | |||














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%High praise
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