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| Coad | 665962 | Type | Single-Axis Scanning Micromirror | |
| Mirror Diameter（mm） | 20.0 x 12.0 | Wavelength(nm) | 800 - 20000 | |
| Connector Type | DF37NB-10DS-04V（HRS）,Gold Coating | Scanning Angle(°) | ±30 | |
| Minimum Angle Position Pulse Output | 0.05° | Voltage | 5 ± 0.2 V | |
| Frequency | 200Hz | Drive Signal Type | Pulse Signal | |
| Coating Specifications | Ravg>96%@800-20000，AOI=8° | |||
MEMS Mirror is an optical MEMS actuator chip that can deflect, modulate, open, close, and control the phase of a laser beam under drive. Based on the different driving methods, MEMS mirrors can be classified into four types: Electrostatic Drive (ES), Electromagnetic Drive (EM), Thermal Drive (ET), and Piezoelectric Drive (PE).
The LBTEK Single-Axis Scanning Micro-Mirror is a chip-based MEMS technology mirror. Under the influence of the drive signal, the micro-mirror performs resonant torsional motion around a torsion beam to achieve single-axis scanning. It offers advantages such as small size and high reliability, and has wide applications in laser scanning, LiDAR, and laser displays.
LBTEK’s Single-Axis Scanning Micro-Mirror is based on MEMS technology, with the MEMS-1.3-1.15K being electrostatically driven and the MEMS-12-0.2K being electromagnetically driven. Under the drive signal, the micro-mirror performs resonant torsional motion around a torsion beam to achieve single-axis scanning. The micro-mirror is made from single-crystal silicon and has a metal coating on the surface to increase reflectivity. The mirror surface is supported by a torsion beam and performs resonant motion under the drive signal (it cannot stop at a specific angle, and the frequency is non-adjustable). For product parameters and usage details, users can download the user manual for further information.
Note: To extend the lifespan of the product, users should minimize the plugging and unplugging of the soft ribbon cable between the development board and the single-axis scanning micro-mirror to avoid damaging the data interface (once damaged, it cannot be repaired).
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